The FEI Helios is a state-of-the-art DualBeam (Focused Ion Beam/Scanning Electron Microscope) system. It combines a high-resolution electron column for imaging with a powerful ion column for precise material milling and deposition. This instrument is indispensable for preparing site-specific atom probe tomography (APT) samples, cross-sectioning microstructures, and performing nanofabrication with exceptional precision.
Hardware Specifications
Electron ColumnElstar column with UC+ technology
Ion ColumnPhoenix Ion Column with Fast Beam Blanker
Stage150 x 150 mm eucentric piezo stage
In-lens DetectionTLD - with SE and BSE modes
Analysis SystemsEDAX Octane Elite Plus EDS / HIKARI Pro EBSD
ControllerxT software version 12.3.2
Chamber CleanupIntegrated plasma cleaner
ImagingICD, Mirror, ICE, and CCD IR camera
Specialized Software Licenses
AutoFIBAutomated FIB processing
AutoTEM 4Automated TEM sample preparation
AutoSlice and View 43D Volume reconstruction imaging
AutomationFull system automation license